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半导体生产设备的保护标准
Standard for the Protection of Semiconductor Fabrication Facilities
参考页数：
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机械安全性.机器电动设备.第33部分:半导体制造设备要求
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment
参考页数：247P;A4
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环境工程(EE).设备实际操作用欧洲电信标准.第3部分:多种机架和机箱的工程要求(英文版本EN 300 119-3 V2.2.2(2010-01)的核准本作为德国标准)
Environmental Engineering (EE) - European telecommunication standard for equipment practice - Part 3: Engineering requirements for miscellaneous racks and cabinets (Endorsement of the English version EN 300 119-3 V2.2.2 (2010-01) as German standard)
参考页数：2P;A4
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机械安全性.机械电气设备.第33部分:半导体制造设备要求
Safety of machinery -- Electrical equipment of machines -- Part 33: Requirements for semiconductor fabrication equipment
参考页数：124P;A4
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半导体制造设备的最终装配、包装、运输、拆包及安放导则
Guide for final assembly, packaging, transportation, unpacking, and relocation of semiconductor manufacturing equipment
价格：￥0.00
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半导体生产设施电磁兼容性要求
Requirements for semiconductor manufacturing facility electromagnetic compatibility
价格：￥0.00
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光掩模对准标记规范
Specification for registration marks for photomasks
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